Name
Abstract | ||
|---|---|---|
The production of micro-scale objects with nanoscale properties demands for appropriate measurement and test equipment for quality control. This work is motivated by an experimental setup to proof nano-positioning capabilities with 200mm traveling range. This paper is about the modeling of an x-y high precision positioning table, with double-H-configuration and driven by direct linear DC motors, using the Lagrange method. Furthermore the elasto-plastic friction model was extended, based on system parameters and former experiments with nano-positioning guides. The influence of the normal force on the friction force is essential for creating a connection between the macroscopic and microscopic models. A simplified model for control purposes was derived and applied to a PI-state regulator with additional feedforward of the system dynamics. Simulation results show the effectiveness of the approach. |
Year | DOI | Venue |
|---|---|---|
2007 | 10.1109/COASE.2007.4341750 | 2007 IEEE INTERNATIONAL CONFERENCE ON AUTOMATION SCIENCE AND ENGINEERING, VOLS 1-3 |
Keywords | Field | DocType |
quality control,lagrange method,dc motor,system dynamics | Regulator,Test equipment,Control theory,Lagrange multiplier,Friction force,DC motor,Control engineering,System dynamics,Normal force,Engineering,Feed forward | Conference |
ISSN | Citations | PageRank |
2161-8070 | 0 | 0.34 |
References | Authors | |
2 | 2 | |
Name | Order | Citations | PageRank |
|---|---|---|---|
| Jan Zimmermann | 1 | 7 | 1.75 |
| Oliver Sawodny | 2 | 241 | 78.60 |